Z02 E

Advanced nanoscale characterization and fabrication

Summary

This service project was responsible for all central tasks related to advanced nanoscale characteri- zation and fabrication techniques within the SFB 1170. This concerned in particular the use of large scale equipment for electron microscopy and lithographic nanostructuring operated by two central materials science facilities at the University of Würzburg, the Röntgen Center for Complex Material Systems (RCCM) and the Gottfried-Landwehr-Laboratory for Nanotechnology (GLLN), respectively. In addition, Z02 was responsible for the operation of two portable ultrahigh vacuum “suitcases” for the in situ sample transfer between the various epitaxy systems and surface science experiments of the SFB 1170, providing unique experimental opportunities.