Tools

Welcome to the cleanroom equipment page of our Experimental Physics department. Here, we present our advanced instruments that enable precise material processing and nanoscale analysis. These tools support our high-level research and innovative experiments. Explore the technology that powers our scientific discoveries

Atomic Layer Deposition 1

Atomic Layer Deposition 2

Chemical Assisted Ion Beam Etching (CAIBE)

Cluster for Ion Beam Etching (IBE) and Metallization

Dektak

 

Evaporator

Inductively Coupled Plasma (ICP)

Scanning Electron Microscop (SEM) / E-Beam Lithography (EBL) / Energy-dispersive X-ray Spectroscopy (EDX)

Microwriter

Mask Aligner MJB3

Optical Microscope with Differential Interference Contrast (DIC)

Pioneer Two for E-Beam Lithography (EBL)

​​​​​​​Reactive Ion Etching (RIE)