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Experimental Physics III

Lithography

Welcome to the EP3 and ITI cleanroom page! Here you can find information about our cleanroom equipment. Many of our instruments are specially designed or modified to allow for the device fabrication of temperature-sensitive HgTe heterostructures.

Side view of a six terminal microscopic Hall bar structure fabricated from a HgTe based Quantum well structure designed for quantum spin Hall effect studies

Close up SEM image of a S-I-N-I-S transport device based on the half-Heusler topological superconductor candidate YPtBi

A Sub 30 nm Quantum Point contact in a HgTe Quantum well heterostructure patterned by wet chemical etching

Side view of a H-shaped Transport device for thermal Transport studies in a HgTe based topological material

Nanostructured Hall bar devices patterned from the half-Heusler superconductor YPtBi: S-I-N-I-S (top) and S-I-N (bottom)

Single Crystal Diamond cantilever attached to a quartz tip prepared for topographic and magnetic Imaging based on Nitrogen vacacies magnetometry

Tunneling devices based on the antiferromagnetic half-Heusler CuMnSb

A mesoscopic transport device formed by Schottky gates on a GaAs based 2 dimensional electron gas

Mesoscopic Transport device based on a HgTe Quantum well heterostructure involving 3 overlapping gate structures

Topological Josephson Junction device including a 3D air Bridge for flux biasing

Side view of a quantum spin Hall prototype Transport device involving 2 Quantum Point contacts and 3 gate structures

Cross sectional SEM Image showing overlapping gate electrodes separated by a 15 nm thick insulating Hafnium oxide layer deposited by low temperature atomic layer deposition

An array of Single Crystal Diamond nanopillars Hosting Nitrogen vacancy defects for magnetic Imaging prepared by ion Implantation and reactive ion etching

Devices based on the half-Heusler CuMnSb designed for studies of current induced switching of the antiferromagnetic order parameter

II-VI semiconductor based resonant Tunneling Diode involving 3 metallic air bridges